HKL-1188 FTIR for Carbon and Oxygen Content In Silicon
Overview
HKL-1188 FTIR for Carbon and Oxygen Content In Silicon conforms to the ASTM F1188 Standard Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption and SEMI MF1391 Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption.
ASTM F1188 covers the determination of the interstitial oxygen content of single crystal silicon by infrared spectroscopy. The useful range of oxygen concentration measurable by the test method is from 1 ×1016 atoms/cm3 to the maximum amount of interstitial oxygen soluble in silicon. SEMI MF1391 utilizes the relationship between carbon concentration and the absorption coefficient of the infrared absorption band associated with substitutional carbon in silicon. At room temperatures (about 300 K), the absorption band peak is at 605 cm-1 or 16.53 μm. At cryogenic temperatures (below 80 K), the absorption band peak is at 607.5 cm⁻¹ or 16.46 μm.
Features
Highly stable optical system: The optical bench adopts an integrated design with monolithic mold forming, where key components are fixed in a single alignment process without adjustment. This greatly improves the stability of the instrument and thoroughly solves the maintenance problems of traditional optical structures.
Modern Electronics: By employing a modern 24-bit A/D converter working at 500 kHz along with a highly sensitive imported infrared detector, the system is able to provide precise and instant spectral results. Moreover, with a high-speed USB 2.0 interface, the data transfer is enhanced, making it possible to analyze a full sample within few seconds.
Smart Humidity Management System: The hermetically sealed interferometer continuously monitors humidity, thereby significantly minimizing user interaction. A user-friendly color-changing indicator alerts the user when it's time to replace the desiccant, which basically helps to avert a major risk of FTIR operation. Desiccant replacement is not only fast and easy but also doesn't require the instrument to be taken apart.
Integrated corner mirror molding process: The moving and the fixed mirror are made of integrally molded gold-plated corner mirrors, which ensures a consistent direction of light and the path of the light with high reflectivity; the bonding-free design is not influenced by the temperature of the environment and gives the instrument a higher level of intrinsic stability.
Core components sourced from the Developed countries in Europe and America: Not only are these critical parts such as the light source, detector, beam splitter, and die, imported, but they also assure the highest quality.
Technical Parameters
Spectral Range: 7800–350 cm-1
Resolution: better than 1.0 cm-1
Detector: High-sensitivity Infrared infrared detector (imported)
Beamsplitter: Potassium Bromide Coating (KBr) with Moisture-Proof Layer
Signal-to-Noise Ratio: Better than 20000:1 P-P value (Test conditions: Detector at 4 cm-1 resolution, 1-minute background and sample scan time, 2100 cm-1 wavenumbers)
Scanning Speed: Microcomputer-controlled with selectable scanning speeds, continuously adjustable, automatic spectrum comparison and Standardized file format.
Light Source: Long-life, high-intensity air-cooled system (imported)
Wavenumber Accuracy: 0.01 cm-1
Software Workstation: Included with the instrument.
Power Supply: AC 220V, 50Hz
Data Transmission Interface: High-speed USB 2.0
Operating system: win7/win10
Weight: 14kg
FAQ
Q1: What standards does the HKL-1188 FTIR carbon and oxygen in silicon measuring instrument meet?
A: HKL-1188 FTIR for Carbon and Oxygen Content In Silicon meets the requirements of ASTM F1188 Standard Test Method for Interstitial Atomic Oxygen Content of Silicon by Infrared Absorption and SEMI MF1391 Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption.
Q2: What is the importance of HKL-1188 FTIR for measuring the carbon and oxygen contents in silicon?
A: The device is intended as a Master method to measure the interstitial oxygen level in double-side polished silicon wafers and substitutional carbon concentration in single crystal silicon. This is a necessary part of materials acceptance, manufacture process control as well as Research and Development.
Q3: What is the minimum order quantity? How long is the delivery lead time?
A: Our products have no minimum order quantity; even a single unit can be purchased. Shipment is scheduled approximately 20 days after receipt of the advance payment.
Q4: What types of instruments does your company mainly provide?
A: Hello! We specialize in fields such as life science analysis, environmental monitoring, and industrial automation control. Our main products include gas chromatographs, viscometers, spectrometers, centrifuges, etc. You can view detailed categories and technical parameters in the Product Center on our official website.
Q5: Do you have any examples of real customers using your solutions or the kinds of benefits they have realized after adoption of the company’s solutions?
A: We are excited to tell you about the many different research institutions, companies, and universities we have worked closely with through which we have gained a lot of experience. Not only does this help prove the quality of our products and services, but it also gives you the opportunity to become acquainted with the kind of environments of use in which our instruments represent an excellent solution for your particular case. We cordially welcome you to access our website at the Case section, where you have the option to filter and view detailed examples per industry or field. If you are unable to find a case that meets your specific requirements, please feel free to contact us; we will be happy to provide you with anonymized and customized case studies for your industry.

About us
Hong Kong Laboratory Technology Limited is a company that focuses on integrating supply chains and providing full technical services for laboratory instruments. We have nearly ten years of knowledge and experience in the industry, and we run our business by following a quality management system that meets several international standards including ISO 9001, ASTM, and IP requirements. The core products not only comply with the ISO/IEC 17025 instrument calibration and testing standards, but are also widely used in research institutions, petrochemical andmining industries, medical institutions,and environmental protection departments. This high-standard quality has earned broad market and customer trust.
Company Advantages
(1)Full-Chain Resource Integration Capability
(2)Professional Technical Service Team
(3)Rich Industry Practical Cases
(4)Reliable After-Sales Service
Service Guarantee
1. Online Training Services
If assistance is needed, we will provide online installation and commissioning services, as well as comprehensive operation training for you. Meanwhile, we also offer 24/7 online training support for end users throughout the year.
2. Professional After-Sales Service
According to the type of instrument, we can provide specialized maintenance services. Our goal is to become the highest-quality and most reliable instrument supplier in the market. We welcome your valuable opinions and suggestions to help us continuously improve our service quality.
Logistics and Shipping
Worldwide Shipping: We have extensive experience in shipping goods to Asia, Europe, the Middle East, and other regions.
Secure Packaging: Laboratory instruments are carefully packed to ensure they are properly secured and protected during transit.
International Certification
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ISO 9001 Certification | ASTM Certificate |










